TY - CONF T1 - Energy Filtered Scanning Electron Microscopy: applications to characterisation of semiconductors JO - ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009) PY - 2010/01/01 AU - Rodenburg C AU - Jepson MAE AU - Inkson BJ AU - Bosch EGT AU - Humphreys CJ ED - Baker RT DO - DOI: 10.1088/1742-6596/241/1/012074 VL - 241 Y2 - 2025/08/28 ER -