TY - CONF T1 - High resolution dopant profiling in the SEM, image widths and surface band-bending - art. no. 012033 JO - EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007 PY - 2008/01/01 AU - Chee KWA AU - Rodenburg C AU - Humphreys CJ ED - Baker RT ED - Mobus G ED - Brown PD VL - 126 SP - 12033 EP - 12033 Y2 - 2025/07/30 ER -