@article{article, title = {{Microplasma copolymerization of amine and Si containing precursors}}, url = {{}}, year = {{2014}}, month = {{1}}, author = {{Bashir M and Zimmerman WB and Rees JM and Bashir S}}, doi = {{10.1016/j.tsf.2014.06.004}}, journal = {{Thin Solid Films}}, note = {{Accessed on 2025/08/14}}}